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Structure and stability of magneto-optical recording bits in rf-magnetron-sputtered DyFeCo Films

โœ Scribed by K. Naito; T. Numata; K. Nakashima; Y. Namba

Book ID
113316706
Publisher
Elsevier Science
Year
1992
Tongue
English
Weight
216 KB
Volume
104-107
Category
Article
ISSN
0304-8853

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## Abstract Rf magnetron sputtering technique was employed for preparation of tantalum oxide films on quartz and crystalline silicon (111) substrates held at room temperature by sputtering of tantalum in an oxygen partial pressure of 1x10^โ€4^ mbar. The films were annealed in air for an hour in the