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Structure and properties of silicon nitride and SixGe1−x nitride prepared by direct low energy ion beam nitridation

✍ Scribed by O.C. Hellman; O. Vancauwenberghe; N. Herbots; J. Olson; R.J. Culbertson; W.J. Croft

Publisher: Elsevier Science
Year: 1992
Tongue: English
Weight: 569 KB
Volume: 12
Category: Article
ISSN: 0921-5107
DOI: 10.1016/0921-5107(92)90258-b

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