✦ LIBER ✦
1173. Preparations of nitride films by ion-beam reactive sputtering: H Erler and Ch Weissmantel, finommech microtech, 13 (1), 1974, 1–4 (in Hungarian)
- Publisher
- Elsevier Science
- Year
- 1975
- Tongue
- English
- Weight
- 155 KB
- Volume
- 25
- Category
- Article
- ISSN
- 0042-207X
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