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Structure and mechanical properties of multi-element (AlCrMnMoNiZr)Nx coatings by reactive magnetron sputtering

✍ Scribed by Ren, Bo; Shen, Zigang; Liu, Zhongxia


Book ID
119944962
Publisher
Elsevier Science
Year
2013
Tongue
English
Weight
947 KB
Volume
560
Category
Article
ISSN
0925-8388

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Microstructure and mechanical properties
✍ M. Benkahoul; P. Robin; S.C. Gujrathi; L. Martinu; J.E. Klemberg-Sapieha πŸ“‚ Article πŸ“… 2008 πŸ› Elsevier Science 🌐 English βš– 429 KB

Cr-Si-N thin films were deposited by pulsed DC reactive dual-magnetron sputtering using Cr and Si targets, while various currents applied to the Si target allowed one to vary the Si content (C Si ) in the films. Microstructure, composition and mechanical properties were studied as a function of C Si