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Microstructure and mechanical properties of hafnium carbide coatings synthesized by reactive magnetron sputtering

โœ Scribed by Guanqun Li; Geyang Li

Book ID
107562282
Publisher
Springer US
Year
2009
Tongue
English
Weight
419 KB
Volume
7
Category
Article
ISSN
1935-3804

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Microstructure and mechanical properties
Microstructure and mechanical properties of Crโ€“Siโ€“N coatings prepared by pulsed reactive dual magnetron sputtering
โœ M. Benkahoul; P. Robin; S.C. Gujrathi; L. Martinu; J.E. Klemberg-Sapieha ๐Ÿ“‚ Article ๐Ÿ“… 2008 ๐Ÿ› Elsevier Science ๐ŸŒ English โš– 429 KB

Cr-Si-N thin films were deposited by pulsed DC reactive dual-magnetron sputtering using Cr and Si targets, while various currents applied to the Si target allowed one to vary the Si content (C Si ) in the films. Microstructure, composition and mechanical properties were studied as a function of C Si