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Microstructure and mechanical properties of vanadium carbide coatings synthesized by reactive magnetron sputtering

โœ Scribed by Xiaoyan Wu; Guangze Li; Yanghui Chen; Geyang Li

Book ID
113656442
Publisher
Elsevier Science
Year
2009
Tongue
English
Weight
319 KB
Volume
27
Category
Article
ISSN
0263-4368

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Microstructure and mechanical properties
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โœ M. Benkahoul; P. Robin; S.C. Gujrathi; L. Martinu; J.E. Klemberg-Sapieha ๐Ÿ“‚ Article ๐Ÿ“… 2008 ๐Ÿ› Elsevier Science ๐ŸŒ English โš– 429 KB

Cr-Si-N thin films were deposited by pulsed DC reactive dual-magnetron sputtering using Cr and Si targets, while various currents applied to the Si target allowed one to vary the Si content (C Si ) in the films. Microstructure, composition and mechanical properties were studied as a function of C Si