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Structure and magnetic properties of RF reactively sputtered Iron nitride thin films

✍ Scribed by Chang, C.; Sivertsen, J.; Judy, J.


Book ID
114649209
Publisher
IEEE
Year
1987
Tongue
English
Weight
729 KB
Volume
23
Category
Article
ISSN
0018-9464

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Physical properties of reactive sputtere
✍ Y Inoue; M Nomiya; O Takai πŸ“‚ Article πŸ“… 1998 πŸ› Elsevier Science 🌐 English βš– 302 KB

We report on the physical properties of tin-nitride thin films deposited onto glass substrates by rf reactive sputtering. The crystal structure of the tin-nitride films is hexagonal and the lattice parameters are calculated from X-ray diffraction patterns as a = 0.369 nm and c = 0.529 nm. X-ray phot