✦ LIBER ✦

Structure and dielectric properties of amorphous LaAlO[sub 3] and LaAlO[sub x]N[sub y] films as alternative gate dielectric materials

✍ Scribed by Lu, Xu-bing; Liu, Zhi-guo; Wang, Yi-ping; Yang, Ying; Wang, Xiao-ping; Zhou, Hong-wei; Nguyen, Bich-yen

Book ID: 120974742
Publisher: American Institute of Physics
Year: 2003
Tongue: English
Weight: 846 KB
Volume: 94
Category: Article
ISSN: 0021-8979
DOI: 10.1063/1.1586976

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