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Structural stability for UV irradiation and dielectric properties of a-CNx films

โœ Scribed by T Itoh; M Aono; S Yoshida; S Hattori; T Katsuno; S Nitta; S Nonomura


Book ID
117150478
Publisher
Elsevier Science
Year
2000
Tongue
English
Weight
126 KB
Volume
266-269
Category
Article
ISSN
0022-3093

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