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Structural, optical, and opto-dielectric properties of W-doped Ga2O3thin films

โœ Scribed by A. A. Dakhel


Book ID
106397151
Publisher
Springer
Year
2011
Tongue
English
Weight
320 KB
Volume
47
Category
Article
ISSN
0022-2461

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The N-doped b-Ga 2 O 3 films were grown on Si and quartz substrates by RF magnetron sputtering in different ammonia partial pressure ratios (from 0% to 30%). The influence of ammonia partial pressure ratios and annealing treatment on the optical and structural properties were studied. The microstruc