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Optical and structural properties of Cu-doped β-Ga2O3 films

✍ Scribed by Yijun Zhang; Jinliang Yan; Qingshan Li; Chong Qu; Liying Zhang; Wanfeng Xie


Publisher
Elsevier Science
Year
2011
Tongue
English
Weight
558 KB
Volume
176
Category
Article
ISSN
0921-5107

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✍ Yijun Zhang; Jinliang Yan; Qingshan Li; Chong Qu; Liying Zhang; Ting Li 📂 Article 📅 2011 🏛 Elsevier Science 🌐 English ⚖ 930 KB

The N-doped b-Ga 2 O 3 films were grown on Si and quartz substrates by RF magnetron sputtering in different ammonia partial pressure ratios (from 0% to 30%). The influence of ammonia partial pressure ratios and annealing treatment on the optical and structural properties were studied. The microstruc