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Structural properties of high-quality sputtered Fe films on Al2O3(1120) and MgO(001) substrates

✍ Scribed by Th. Mühge; A. Stierle; N. Metoki; H. Zabel; U. Pietsch

Publisher
Springer
Year
1994
Tongue
English
Weight
710 KB
Volume
59
Category
Article
ISSN
1432-0630

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We reveal the influence of the deposition conditions on the physical properties of cermet films made of nanometer sized magnetic metal (# ~/~0) and alumina grains. The films were prepared by r.f. cosputtering under two typical base pressures (10 -6 and 10 -7 Torr), using either an argon plasma or an