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Structural properties of GaN grown on LiGaO2 by PLD

✍ Scribed by H. Takahashi; H. Fujioka; J. Ohta; M. Oshima; M. Kimura


Book ID
108342009
Publisher
Elsevier Science
Year
2003
Tongue
English
Weight
133 KB
Volume
259
Category
Article
ISSN
0022-0248

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We show that non-polar M-plane and A-plane GaN can be grown on LiGaO 2 with very high phase purity. The morphology of the GaN surfaces is influenced by the underlying substrate morphology, which exhibits a high abundance of surface scratches. Nevertheless, the root-mean-square roughness of the sampl