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Structural properties of Fe ion implanted and ruby laser annealed Si layers

✍ Scribed by Bayazitov, R M; Batalov, R I; Khaibullin, I B; Ivlev, G D; Dézsi, I; Kótai, E


Book ID
111687725
Publisher
Institute of Physics
Year
2004
Tongue
English
Weight
203 KB
Volume
37
Category
Article
ISSN
0022-3727

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