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Structural, mechanical and tribological properties of plasma-assisted chemically vapour deposited hydrogenated CxN1−x:H films

✍ Scribed by E.H.A. Dekempeneer; J. Meneve; J. Smeets; S. Kuypers; L. Eersels; R. Jacobs

Publisher: Elsevier Science
Year: 1994
Tongue: English
Weight: 415 KB
Volume: 68-69
Category: Article
ISSN: 0257-8972
DOI: 10.1016/0257-8972(94)90227-5

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