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Composition, morphology and mechanical properties of plasma-assisted chemically vapor-deposited TiN films on M2 tool steel

✍ Scribed by M.R. Hilton; L.R. Narasimhan; S. Nakamura; M. Salmeron; G.A. Somorjai


Publisher
Elsevier Science
Year
1986
Tongue
English
Weight
867 KB
Volume
139
Category
Article
ISSN
0040-6090

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