TiN coatings on M2 steel produced by plasma-assisted chemical vapor deposition: M R Hilton et al, Thin Solid Films, 154, 1987, 377–386

• Publisher: Elsevier Science
• Year: 1989
• Tongue: English
• Weight: 305 KB
• Volume: 39
• Category: Article
• ISSN: 0042-207X
• DOI: 10.1016/0042-207x(89)90394-1