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Structural evolution in Fe ion implanted Si upon thermal annealing

✍ Scribed by Keisuke Omae; In-Tae Bae; Muneyuki Naito; Manabu Ishimaru; Yoshihiko Hirotsu; James A. Valdez; Kurt E. Sickafus

Publisher
Elsevier Science
Year
2006
Tongue
English
Weight
193 KB
Volume
250
Category
Article
ISSN
0168-583X

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