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Structural, electrical and optical properties of indium tin oxide thin films prepared by RF sputtering using different density ceramic targets

✍ Scribed by Wei Zhang; Guisheng Zhu; Li Zhi; Huijuan Yang; Zupei Yang; Aibing Yu; Huarui Xu

Book ID
113940945
Publisher
Elsevier Science
Year
2012
Tongue
English
Weight
433 KB
Volume
86
Category
Article
ISSN
0042-207X

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## Abstract Molybdenum doped indium oxide (IO) thin films were deposited on the Coring F1737 glass substrates at 400 °C by spray pyrolysis technique. The Mo doping was varied between 0 and 4 at.%. The films were characterized by their structural, electrical and optical properties. The films are con