Structural, optical and electrical properties of indium-molybdenum oxide thin films prepared by spray pyrolysis

✍ Scribed by Parthiban, S. ;Elangovan, E. ;Ramamurthi, K. ;Goncalves, G. ;Martins, R. ;Fortunato, E.

• Publisher: John Wiley and Sons
• Year: 2010
• Tongue: English
• Weight: 239 KB
• Volume: 207
• Category: Article
• ISSN: 0031-8965
• DOI: 10.1002/pssa.200983745

✦ Synopsis

Abstract

Molybdenum doped indium oxide (IO) thin films were deposited on the Coring F1737 glass substrates at 400 °C by spray pyrolysis technique. The Mo doping was varied between 0 and 4 at.%. The films were characterized by their structural, electrical and optical properties. The films are confirmed to be cubic bixbyite In~2~O~3~ with a strongest orientation along (222) for 0.5 at.% Mo, which is shifted to (400) plane when the Mo doping is increased to ≥1.2 at.%. The films deposited with 0.5 at.% Mo showed high mobility of ∼90 cm^2^/Vs, resistivity of ∼6.8 × 10^−4^ Ω cm and carrier concentration of ∼1.01 × 10^20^ cm^−3^ with >∼73% transmittance in the visible range between 500 and 800 nm. The transmittance is well extended into near infrared region.