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Influence of substrate temperature on the structural, optical and electrical properties of ZnO thin films prepared by spray pyrolysis

โœ Scribed by H. H. Afify; S. A. Nasser; S. E. Demian


Publisher
Springer US
Year
1991
Tongue
English
Weight
507 KB
Volume
2
Category
Article
ISSN
0957-4522

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Influence of substrate and film thicknes
โœ N. Gopalakrishnan; L. Balakrishnan; K. Latha; S. Gowrishankar ๐Ÿ“‚ Article ๐Ÿ“… 2011 ๐Ÿ› John Wiley and Sons ๐ŸŒ English โš– 143 KB ๐Ÿ‘ 2 views

## Abstract Transparent Zinc Oxide (ZnO) thin films have been grown on Si (100) and Sapphire (0001) substrates by RF magnetron sputtering for different growth time intervals (10, 30 and 60 min) to study the substrate and thickness effects. All the films have been grown at a substrate temperature of