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Effect of Target Density on Microstructural, Electrical, and Optical Properties of Indium Tin Oxide Thin Films

✍ Scribed by Guisheng Zhu, Li Zhi, Huijuan Yang, Huarui Xu, Aibing Yu

Book ID
118816397
Publisher
Springer US
Year
2012
Tongue
English
Weight
351 KB
Volume
41
Category
Article
ISSN
0361-5235

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This work has been concerned with the measurement and analysis of the electro-optical properties of thin films of indium tin oxide deposited by ion beam sputtering. In the present context, the principal use of these films is for window layer solar cells, and it is necessary to have an accurate knowl