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Structural defects in 6H-SiC substrates and their effect on the sublimation growth of epitaxial layers in vacuum

✍ Scribed by L. M. Sorokin; A. S. Tregubova; M. P. Shcheglov; A. A. Lebedev; N. S. Savkina

Book ID: 110124513
Publisher: SP MAIK Nauka/Interperiodica
Year: 2000
Tongue: English
Weight: 404 KB
Volume: 42
Category: Article
ISSN: 1063-7834
DOI: 10.1134/1.1307045

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