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Structural defects and electrical conductivity in nanocrystalline SiC:H films doped with boron and grown by photostimulated chemical-vapor deposition

✍ Scribed by O. I. Shevaleevskiy; S. Y. Myong; K. S. Lim; S. Miyajima; M. Konagai

Book ID: 110143152
Publisher: Springer
Year: 2005
Tongue: English
Weight: 57 KB
Volume: 39
Category: Article
ISSN: 1063-7826
DOI: 10.1134/1.1944863

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