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Structural characterization of μc-Si:H films produced by R.F. magnetron sputtering

✍ Scribed by M.F Cerqueira; J.A Ferreira; M Andritschky; Manuel F.M Costa


Book ID
114155959
Publisher
Elsevier Science
Year
1998
Tongue
English
Weight
303 KB
Volume
43-44
Category
Article
ISSN
0167-9317

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