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Characterization of nano-structured TiN thin films prepared by R.F. magnetron sputtering

✍ Scribed by Taek-Soo Kim; Sang-Shik Park; Byong-Taek Lee

Book ID: 113789125
Publisher: Elsevier Science
Year: 2005
Tongue: English
Weight: 677 KB
Volume: 59
Category: Article
ISSN: 0167-577X
DOI: 10.1016/j.matlet.2005.07.047

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