✦ LIBER ✦

Production and characterization of Si-N films obtained by r.f. magnetron sputtering

✍ Scribed by A. Oliveira; A. Cavaleiro; M.T. Vieira

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

Production and characterization of boron

✍ M. Elena; L. Guzman; S. Gialanella 📂 Article 📅 1988 🏛 Elsevier Science 🌐 English ⚖ 754 KB

Characterization of HfBx films deposited

✍ W.Y. Lee; G. Olive; F. Sequeda; V. Deline; T. Huang; G. Gorman; D.W. Chung 📂 Article 📅 1988 🏛 Elsevier Science 🌐 English ⚖ 430 KB

Growth and dielectric characterization o

✍ W.M. Cranton; D.M. Spink; R. Stevens; C.B. Thomas 📂 Article 📅 1993 🏛 Elsevier Science 🌐 English ⚖ 396 KB

Characterization and optimization of cer

✍ K.B Sundaram; P.F Wahid; P.J Sisk 📂 Article 📅 1992 🏛 Elsevier Science 🌐 English ⚖ 279 KB

Silicate glass films deposited by reacti

✍ G. Della Mea; V. Rigato; P. Colombo; R. Dal Maschio; C. Sighel; S. Zandolin; P.K 📂 Article 📅 1994 🏛 Elsevier Science 🌐 English ⚖ 421 KB

Investigation of SiO2/Si3N4 films prepar

✍ Liping Feng; Zhengtang Liu; Qiang Li; Wenyan Song 📂 Article 📅 2006 🏛 Elsevier Science 🌐 English ⚖ 294 KB