Structural characterization of nonpolar (112¯0) a-plane GaN thin films grown on (11¯02) r-plane sapphire
✍ Scribed by Craven, M. D.; Lim, S. H.; Wu, F.; Speck, J. S.; DenBaars, S. P.
- Book ID
- 118023737
- Publisher
- American Institute of Physics
- Year
- 2002
- Tongue
- English
- Weight
- 498 KB
- Volume
- 81
- Category
- Article
- ISSN
- 0003-6951
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## Abstract Structural state of nonpolar a‐plane GaN layers grown by MOVPE on r‐plane sapphire is investigated by X‐ray diffraction method. Interplanar spacings were measured in three directions and corresponding strains were determined. A crystalline perfection was studied by measurement of diffra
The optimal conditions of p-type activation for nonpolar a-plane (1 1 -2 0) p-type GaN films on r-plane (1 -1 0 2) sapphire substrates with various off-axis orientations have been investigated. Secondary ion mass spectrometry (SIMS) measurements show that Mg doping concentrations of 6.58 Â 10 19 cm