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Structural characterization and optical properties of UO2 thin films by magnetron sputtering

✍ Scribed by Qiuyun Chen; Xinchun Lai; Bin Bai; Mingfu Chu


Publisher
Elsevier Science
Year
2010
Tongue
English
Weight
351 KB
Volume
256
Category
Article
ISSN
0169-4332

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The NiO x thin films were deposited by reactive dc-magnetron sputtering from a nickel metal target in Ar + O 2 with the relative O 2 content 5%. The as-deposited NiO x thin films could represent a two-component system comprising crystalline NiO particles dispersed in an amorphous Ni 2 O 3 . Decompos