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Structural change induced by laser annealing in hydrogenated amorphous silicon films

✍ Scribed by Boqiang Zhong; Zhongqian Lu; Renye Tang


Book ID
115986973
Publisher
Elsevier Science
Year
1989
Tongue
English
Weight
301 KB
Volume
112
Category
Article
ISSN
0022-3093

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Laser annealing study of PECVD deposited
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The influence of carbon content on the crystallization process has been investigated for the excimer laser annealed hydrogenated amorphous silicon carbon alloy films deposited by Plasma Enhanced Chemical Vapour Deposition (PECVD) technique, using silane methane gas mixture diluted in helium, as well