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Structural and photoluminescence characteristics of ZnO films by room temperature sputtering and rapid thermal annealing process

โœ Scribed by P.-T. Hsieh; Y.-C. Chen; C.-M. Wang; Y.-Z. Tsai; C.-C. Hu


Publisher
Springer
Year
2006
Tongue
English
Weight
588 KB
Volume
84
Category
Article
ISSN
1432-0630

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ZnO thin films were deposited on corning glass substrates by RF magnetron sputtering at room temperature. The dependence of crystal structure, morphology and optical properties on postdeposition annealing was investigated using XRD, AFM and UV-vis Spectrophotometer. The asdeposited films were amorph