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Structural and opto-electrical properties of Cu–Al–O thin films prepared by magnetron sputtering method

✍ Scribed by Zhang, Yongjian; Liu, Zhengtang; Zang, Duyang; Feng, Liping


Book ID
120406913
Publisher
Elsevier Science
Year
2014
Tongue
English
Weight
286 KB
Volume
99
Category
Article
ISSN
0042-207X

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Thin films of ZrO 2 were prepared by reactive magnetron sputtering. Annealing of the films exhibited a drastic change in the properties due to improved crystallinity and packing density. The root mean square roughness of the sample observed from atomic force microscope is about 5.75 nm which is comp