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Structural and optical properties of nitrided silicon oxide layers rapid thermally grown in a pure N2O ambient

โœ Scribed by E. Hartmannsgruber; U. Rossow; A. Hoyer; P. Lange


Book ID
115990390
Publisher
Elsevier Science
Year
1995
Tongue
English
Weight
373 KB
Volume
187
Category
Article
ISSN
0022-3093

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