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Structural and optical properties of magnetron sputtered and pulsed beam annealed Ge/Si layers

✍ Scribed by Galkin, K. N.; Batalov, R. I.; Bayazitov, R. M.; Novikov, H. A.; Shustov, V. A.; Bizyaev, D. A.; Gaiduk, P. I.; Ivlev, G. D.; Prokopyev, S. L.

Book ID
126883708
Publisher
John Wiley and Sons
Year
2013
Tongue
English
Weight
1002 KB
Volume
10
Category
Article
ISSN
1862-6351

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Structure and property of Ge/Si nanomult
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✍ Shihua Huang; Zhou Xia; Hong Xiao; Jufang Zheng; Yunlong Xie; Guanqun Xie πŸ“‚ Article πŸ“… 2009 πŸ› Elsevier Science 🌐 English βš– 316 KB

Ge/Si nanomultilayers were prepared using magnetron sputtering deposition and adjusting the growth conditions, such as the substrate temperature, sputtering pressure, sputtering power and annealing temperature. The surface topography and microstructure of the nanomultilayers were characterized by X-