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Interfacial and optical properties of ZrO2/Si by reactive magnetron sputtering

✍ Scribed by L.Q. Zhu; Q. Fang; G. He; M. Liu; L.D. Zhang

Book ID: 113789338
Publisher: Elsevier Science
Year: 2006
Tongue: English
Weight: 225 KB
Volume: 60
Category: Article
ISSN: 0167-577X
DOI: 10.1016/j.matlet.2005.10.039

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