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Structural and optical properties of ZnO fabricated by reactive e-beam and rf magnetron sputtering techniques

✍ Scribed by R. Al Asmar; G. Ferblantier; F. Mailly; A. Foucaran

Publisher
John Wiley and Sons
Year
2005
Tongue
English
Weight
153 KB
Volume
2
Category
Article
ISSN
1862-6351

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ZnO thin films were deposited on corning glass substrates by RF magnetron sputtering at room temperature. The dependence of crystal structure, morphology and optical properties on postdeposition annealing was investigated using XRD, AFM and UV-vis Spectrophotometer. The asdeposited films were amorph