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Structural and mechanical characteristics of (1 0 3) AlN thin films prepared by radio frequency magnetron sputtering

✍ Scribed by Ping-Feng Yang; Sheng-Rui Jian; Sean Wu; Yi-Shao Lai; Chung-Ting Wang; Rong-Sheng Chen

Publisher
Elsevier Science
Year
2009
Tongue
English
Weight
899 KB
Volume
255
Category
Article
ISSN
0169-4332

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