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Structural, optical properties and band gap alignments of ZrOxNy thin films on Si (1 0 0) by radio frequency sputtering at different deposition temperatures

✍ Scribed by L.Q. Zhu; Q. Fang; X.J. Wang; J.P. Zhang; M. Liu; G. He; L.D. Zhang

No coin nor oath required. For personal study only.

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Structural, optical properties and band gap alignments of ZrOxNy thin films on Si (1&#xa0;0&#xa0;0) by radio frequency sputtering at different deposition temperatures