✦ LIBER ✦

Structural and electronic properties of low dielectric constant fluorinated amorphous carbon films

✍ Scribed by Ma, Yanjun; Yang, Hongning; Guo, J.; Sathe, C.; Agui, A.; Nordgren, J.

Book ID: 120345757
Publisher: American Institute of Physics
Year: 1998
Tongue: English
Weight: 355 KB
Volume: 72
Category: Article
ISSN: 0003-6951
DOI: 10.1063/1.121601

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

Structural and electronic properties of

Structural and electronic properties of low dielectric constant carbon rich amorphous silicon carbide

✍ Li, Xuemei; Wong, T.K.S.; Rusli, ; Yang, Dajiang 📂 Article 📅 2003 🏛 Elsevier Science 🌐 English ⚖ 204 KB

Plasma deposition of low-dielectric-cons

Plasma deposition of low-dielectric-constant fluorinated amorphous carbon

✍ Endo, Kazuhiko; Shinoda, Keisuke; Tatsumi, Toru 📂 Article 📅 1999 🏛 American Institute of Physics 🌐 English ⚖ 455 KB

Structural properties of fluorinated amo

Structural properties of fluorinated amorphous carbon films

✍ Wang, X.; Harris, H. R.; Bouldin, K.; Temkin, H.; Gangopadhyay, S.; Strathman, M 📂 Article 📅 2000 🏛 American Institute of Physics 🌐 English ⚖ 309 KB

Characterization of low dielectric const

Characterization of low dielectric constant amorphous carbon nitride films

✍ M Aono; S Nitta; T Katsuno; T Itoh; S Nonomura 📂 Article 📅 2000 🏛 Elsevier Science 🌐 English ⚖ 154 KB

## Ž . Amorphous carbon nitride a-CN films have rather high resistivity and low dielectric constants that could be applied as x low dielectric constant materials. Several properties of a-CN films including interactions with metal electrodes are studied x and discussed using data from the frequency

Dielectric function, electronic properti

Dielectric function, electronic properties and optical constants of amorphous carbon and carbon nitride films

✍ Gioti, M.; Logothetidis, S. 📂 Article 📅 2003 🏛 Elsevier Science 🌐 English ⚖ 588 KB

Changes in structure and nature of defec

Changes in structure and nature of defects by annealing of fluorinated amorphous carbon thin films with low dielectric constant

✍ Yokomichi, Haruo; Hayashi, Tohru; Masuda, Atsushi 📂 Article 📅 1998 🏛 American Institute of Physics 🌐 English ⚖ 340 KB