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Dielectric function, electronic properties and optical constants of amorphous carbon and carbon nitride films

✍ Scribed by Gioti, M.; Logothetidis, S.

Book ID
120348981
Publisher
Elsevier Science
Year
2003
Tongue
English
Weight
588 KB
Volume
12
Category
Article
ISSN
0925-9635

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πŸ“œ SIMILAR VOLUMES

Characterization of low dielectric const
Characterization of low dielectric constant amorphous carbon nitride films
✍ M Aono; S Nitta; T Katsuno; T Itoh; S Nonomura πŸ“‚ Article πŸ“… 2000 πŸ› Elsevier Science 🌐 English βš– 154 KB

## Ε½ . Amorphous carbon nitride a-CN films have rather high resistivity and low dielectric constants that could be applied as x low dielectric constant materials. Several properties of a-CN films including interactions with metal electrodes are studied x and discussed using data from the frequency