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Structural and electrical properties of antiferroelectric lead zirconate thin films prepared by reactive magnetron co-sputtering

✍ Scribed by K YAMAKAWA; K. WA GACHIGI; S TROLIER-McKINSTRY; J. P DOUGHERTY

Book ID
110374057
Publisher
Springer
Year
1997
Tongue
English
Weight
894 KB
Volume
32
Category
Article
ISSN
0022-2461

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Thin films of ZrO 2 were prepared by reactive magnetron sputtering. Annealing of the films exhibited a drastic change in the properties due to improved crystallinity and packing density. The root mean square roughness of the sample observed from atomic force microscope is about 5.75 nm which is comp