𝔖 Bobbio Scriptorium
✦   LIBER   ✦

Structural and electrical characterization of ALCVD ZrO2 thin films on silicon

✍ Scribed by S. Ferrari; D.T. Dekadjevi; S. Spiga; G. Tallarida; C. Wiemer; M. Fanciulli

Book ID
117145723
Publisher
Elsevier Science
Year
2002
Tongue
English
Weight
231 KB
Volume
303
Category
Article
ISSN
0022-3093

No coin nor oath required. For personal study only.

πŸ“œ SIMILAR VOLUMES

Structural and electrical characteristic
Structural and electrical characteristics of ZrO2–TiO2 thin films by sol–gel method
✍ Cheng-Hsing Hsu; Ching-Fang Tseng; Chun-Hung Lai; Hsin-Han Tung; Shih-Yao Lin πŸ“‚ Article πŸ“… 2010 πŸ› Elsevier Science 🌐 English βš– 558 KB

In this paper, we investigated electrical properties and microstructures of ZrTiO 4 (ZrO 2 -TiO 2 ) thin films prepared by the sol-gel method on ITO substrates at different annealing temperatures. All films exhibited ZrTiO 4 (1 1 1) and (1 0 1) orientations perpendicular to the substrate surface, an