Electrical, optical and structural characterization of high-k dielectric ZrO2thin films deposited by the pyrosol technique

✍ Scribed by G. Reyna-García; M. García-Hipólito; J. Guzmán-Mendoza; M. Aguilar-Frutis; C. Falcony

• Book ID: 111591061
• Publisher: Springer US
• Year: 2004
• Tongue: English
• Weight: 567 KB
• Volume: 15
• Category: Article
• ISSN: 0957-4522
• DOI: 10.1023/b:jmse.0000031598.04081.fd