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Characterisation of ALCVD Al2O3–ZrO2 nanolaminates, link between electrical and structural properties

✍ Scribed by W.F.A. Besling; E. Young; T. Conard; C. Zhao; R. Carter; W. Vandervorst; M. Caymax; S. De Gendt; M. Heyns; J. Maes; M. Tuominen; Suvi Haukka

Book ID
117145732
Publisher
Elsevier Science
Year
2002
Tongue
English
Weight
362 KB
Volume
303
Category
Article
ISSN
0022-3093

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