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Structural and electrical characteristics of oxygen-implanted 6H-SiC

✍ Scribed by Lianwei Wang; Jipo Huang; Xinzhong Duo; Zhitang Song; Chenglu Lin; Carl-Mikael Zetterling; Mikael Östling


Book ID
114163969
Publisher
Elsevier Science
Year
2000
Tongue
English
Weight
106 KB
Volume
169
Category
Article
ISSN
0168-583X

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