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Structural and chemical analysis of all sputtered a-Si/a-C multilayers

✍ Scribed by E. Ech-chamikh; M. Azizan; E.L. Ameziane; J.Y. Veuillen; M. Brunel

Publisher: Elsevier Science
Year: 1993
Tongue: English
Weight: 285 KB
Volume: 29
Category: Article
ISSN: 0927-0248
DOI: 10.1016/0927-0248(93)90071-a

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