𝔖 Bobbio Scriptorium
✦   LIBER   ✦

Structural and chemical analysis of a model Si–SiO 2 interface using spatially resolved electron-energy-loss spectroscopy

✍ Scribed by Cheynet, M. C.; Epicier, T.


Book ID
120015609
Publisher
Taylor and Francis Group
Year
2004
Tongue
English
Weight
1002 KB
Volume
84
Category
Article
ISSN
1478-6435

No coin nor oath required. For personal study only.


📜 SIMILAR VOLUMES


Analyses of composition and chemical shi
✍ K Kimoto; K Kobayashi; T Aoyama; Y Mitsui 📂 Article 📅 1999 🏛 Elsevier Science 🌐 English ⚖ 934 KB

Composition and chemical shift analyses of a multilayer (SiO 2 /Si 3 N 4 /SiO x N y /Si) were performed by spatially resolved electron energy loss spectroscopy (EELS) using an energy-filtering transmission electron microscope (EFTEM). Using EFTEM-based spatially resolved EELS (EFTEM-SREELS), many sp