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Structural analysis of ZrN and TiN films prepared by reactive plasma beam deposition

✍ Scribed by P. Panjan; B. Navinšek; A. Žabkar; V. Marinković; Dj. Mandrino; J. Fišer

Publisher
Elsevier Science
Year
1993
Tongue
English
Weight
781 KB
Volume
228
Category
Article
ISSN
0040-6090

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