Reactivity between Ti and N2C2H2 mixed gas on Ti(C, N) film deposition by arc-like plasma-enhanced ion plating

✍ Scribed by H. Kajioka; K. Higuchi; Y. Kawashimo

• Publisher: Elsevier Science
• Year: 1993
• Tongue: English
• Weight: 501 KB
• Volume: 228
• Category: Article
• ISSN: 0040-6090
• DOI: 10.1016/0040-6090(93)90616-w