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Influence of the deposition parameters on the composition, structure and X-ray photoelectron spectroscopy spectra of TiN films

✍ Scribed by M.V. Kuznetsov; M.V. Zhuravlev; E.V. Shalayeva; V.A. Gubanov


Publisher
Elsevier Science
Year
1992
Tongue
English
Weight
659 KB
Volume
215
Category
Article
ISSN
0040-6090

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